DocumentCode :
3568918
Title :
Neural network based process control of integrated circuit wire bonding machine
Author :
Khotanzad, A. ; Elragal, Hassan ; Kinnaird, Clark
Author_Institution :
Dept. of Electr. Eng., Southern Methodist Univ., Dallas, TX, USA
Volume :
4
fYear :
1999
fDate :
6/21/1905 12:00:00 AM
Firstpage :
2226
Abstract :
The electrical connections between an integrated circuit (IC) die and the package external leads are made by gold wires in a process called wire bonding. This task is done with a special wire bonding machine. This machine has several parameters to set. These settings are dependent on many factors, including wire size, die material, package size, etc. At present, the machine operator sets these parameters in an ad-hoc fashion based on guidelines and their experience. This paper describes an iterative neural network based closed loop controller for regulating two important characteristics of wire bond, ball size and shear strength density. This controller provides the settings for four parameters that have major impact on these two metrics. The performance is tested on actual machine; results show successful process control
Keywords :
closed loop systems; integrated circuit manufacture; lead bonding; multilayer perceptrons; neurocontrollers; process control; IC die; ball size; closed loop controller; die material; electrical connections; gold wires; integrated circuit wire bonding machine; iterative neural network; neural network based process control; package external leads; package size; process control; shear strength density; wire size; Bonding; Gold; Guidelines; Integrated circuit packaging; Neural networks; Packaging machines; Process control; Size control; Testing; Wire;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Neural Networks, 1999. IJCNN '99. International Joint Conference on
ISSN :
1098-7576
Print_ISBN :
0-7803-5529-6
Type :
conf
DOI :
10.1109/IJCNN.1999.833407
Filename :
833407
Link To Document :
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