Title :
A reconfigurable charge pump in 0.13 μm CMOS for agile MEMS actuation
Author :
Alameh, Abdul Hafiz ; Robichaud, Alexandre ; Nabki, Frederic
Author_Institution :
CoFaMic Res. Center, Univ. du Quebec a Montreal (UQAM) Montreal, Montreal, QC, Canada
Abstract :
An 8 stage reconfigurable charge pump is presented for MEMS electrostatic actuation. The circuit attains a simulated output voltage of 10.62 V from a 1.2 V supply with digitally programmable voltage levels. Reduced power consumption is achieved using a variable frequency clock. The charge pump exhibits a short rise time of 1.56 μs with a 50 MHz clock and 1 pF load. The circuit is designed in 0.13 μm CMOS technology and has a compact area of 215 μm × 300 μm.
Keywords :
CMOS integrated circuits; charge pump circuits; electrostatic actuators; agile MEMS actuation; capacitance 1 pF; electrostatic actuation; frequency 50 Hz; reconfigurable charge pump; size 0.13 mum; time 1.56 mus; voltage 1.2 V; voltage 10.62 V; CMOS integrated circuits; Charge pumps; Clocks; Discharges (electric); Micromechanical devices; Transistors; Voltage control;
Conference_Titel :
Electronics, Circuits and Systems (ICECS), 2014 21st IEEE International Conference on
DOI :
10.1109/ICECS.2014.7050074
