Welding the high-frequency parts of the terahertz devices

To meet the airtightness and small deformation requirements of the welding of high-frequency devices, we use a precision diffusion welding method which is free of the issues such as solder flowing usually encountered in the traditional brazing. This method is realized by forcing pressure with a help of heavy objects to press on the parts in the common vacuum furnace oven. In the first set of experiment, the deformation of test-pieces is in the range of 0.03-0.05mm under the welding pressure of 0.4-0.5Mpa. In the second experiment, the deformation is in the range of 0.01-0.03mm under the pressure 0.07-0.1Mpa. The experiments suggest that the quality of diffusion welding is remarkably affected by the roughness and cleanliness of the welding surfaces.