3D nanoassembly of carbon nanotubes through nanorobotic manipulations

Author

Dong, Lixin ; Arai, Fumihito ; Fukuda, Toshio

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

Volume

2

fYear

2002

fDate

6/24/1905 12:00:00 AM

Firstpage

1477

Abstract

Nanoassembly of multi-walled carbon nanotubes (MWNTs) in three-dimensional space is realized by positioning these building blocks with nanometer order accuracy, joining them together through van der Waals forces, and fixing them with electron-beam-induced deposition (EBID) or chemical bonds through mechanochemical nanorobotic manipulations. MWNT I-junctions and Y-junctions are constructed. For parallel nanoassembly, the concept of parallel EBID is presented, a MWNT electron-beam emitter is prepared through nanoassembly of MWNTs onto commercially available atomic force microscope (AFM) cantilevers, and the feasibility of using them for parallel EBID is investigated.

Keywords

atomic force microscopy; carbon nanotubes; electron beam deposition; micromanipulators; nanotechnology; 3D nanoassembly; I-junctions; Y-junctions; atomic force microscope cantilevers; chemical bonds; electron-beam-induced deposition; molecular nanotechnology; multi-walled carbon nanotubes; nanometer order accuracy; nanorobotic manipulations; parallel nanoassembly; positioning; van der Waals forces; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Cathodes; Electron microscopy; Mechanical factors; Nanostructures; Scanning electron microscopy; Systems engineering and theory; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics and Automation, 2002. Proceedings. ICRA '02. IEEE International Conference on

Print_ISBN

0-7803-7272-7

Type

conf

DOI

10.1109/ROBOT.2002.1014752

Filename

1014752