Title :
Measurement of conductivity and thickness of semiconductor wafers by means of microwave photonic structures
Author :
Usanov, D.A. ; Nikitov, S.A. ; Skripal, A.V. ; Postelga, A.E. ; Ponomarev, Denis V. ; Chernyshevskiy, N.G.
Abstract :
The technique of simultaneously determination of thickness and electrical conductivity of structures based on semiconductor layers, which play a role of the irregularity in one-dimensional waveguide photonic crystals has been developed. The experimental results and the inverse problem solving are presented.
Keywords :
electrical conductivity measurement; microwave photonics; photonic crystals; semiconductor technology; thickness measurement; electrical conductivity measurement; microwave photonic structures; one-dimensional waveguide photonic crystals; semiconductor layers; semiconductor wafers; thickness measurement; Conductivity; Microwave measurements; Microwave photonics; Photonic crystals; Reflection; Semiconductor device measurement;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2012 22nd International Crimean Conference
Print_ISBN :
978-1-4673-1199-1
