Design of terahertz waveguide-fed antipodal hyperbolic-sine tapered slot antenna based on silicon micromachine

Author

Peng-Fei Zhao ; Qing Li ; Hong-Da Lu ; Bin Li ; Yong Liu ; Xin Lv

Author_Institution

Beijing Key Lab. of Millimeter Wave & Terahertz Technol., Beijing Inst. of Technol., Beijing, China

fYear

2015

Firstpage

358

Lastpage

360

Abstract

A THz antipodal hyperbolic-sine tapered slot antenna (AHSTSA) designed on silicon is proposed in this paper. The antenna is feed by WR2.2 waveguide and work at 480GHz to 500GHz. The antipodal curved slots and feeding waveguide are designed to be monolithically fabricated by deep reactive-ion etching (DRIE), then sputtering gold, with gold-gold thermo-compression bonding at last. The simulation result of VSWR is below 1.25 within 480GHz to 520GHz. The AHSTSA shows asymmetric beamwidths of ~20° in both E- and H-plane, with a maximum gain of 17.7dBi. The cross polarization and sidelobe levels are less than -20.7dBi and -10.6dBi, respectively. The proposed AHSTSA can be used in THz imaging and detection systems.

Keywords

hyperbolic equations; slot antennas; waveguide antennas; AHSTSA; DRIE; antipodal curved slots; cross polarization; deep reactive ion etching; feeding waveguide; frequency 480 GHz to 500 GHz; gold-gold thermo compression bonding; silicon micromachine; sputtering gold; terahertz waveguide fed antipodal hyperbolic sine tapered slot antenna design; Antenna radiation patterns; Dipole antennas; Horn antennas; Optical waveguides; Silicon; Slot antennas;

fLanguage

English

Publisher

ieee

Conference_Titel

Computational Electromagnetics (ICCEM), 2015 IEEE International Conference on

Type

conf

DOI

10.1109/COMPEM.2015.7052661

Filename

7052661