Title :
Growth rate dependence of nitrogen incorporation in reactively sputtered FeAlN films for recording head poles
Author :
Bain, J.A. ; Pellerin, K. ; Chow, J.T. ; Pei Zou
Author_Institution :
Carnegie Mellon University
Keywords :
Atomic layer deposition; Iron; Kinetic theory; Magnetic films; Magnetic flux; Magnetic materials; Magnetic properties; Nitrogen; Radio frequency; Sputtering;
Conference_Titel :
Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International
Conference_Location :
Toronto, ON, Canada
Print_ISBN :
0-7803-5943-7
DOI :
10.1109/INTMAG.2000.871995
