DocumentCode

357219

Title

Growth rate dependence of nitrogen incorporation in reactively sputtered FeAlN films for recording head poles

Author

Bain, J.A. ; Pellerin, K. ; Chow, J.T. ; Pei Zou

Author_Institution

Carnegie Mellon University

fYear

2000

fDate

9-13 April 2000

Firstpage

217

Lastpage

217

Keywords

Atomic layer deposition; Iron; Kinetic theory; Magnetic films; Magnetic flux; Magnetic materials; Magnetic properties; Nitrogen; Radio frequency; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International

Conference_Location

Toronto, ON, Canada

Print_ISBN

0-7803-5943-7

Type

conf

DOI

10.1109/INTMAG.2000.871995

Filename

871995