DocumentCode

357225

Title

Thin film processing by biased target ion beam deposition

Author

Hylton, T.L. ; Baldwin, D. ; Ciorneiu, B. ; Escorcia, O. ; Son, J. ; McClure, M. ; Waters, G.

Author_Institution

CVC, Inc.

fYear

2000

fDate

9-13 April 2000

Firstpage

224

Lastpage

224

Keywords

Atherosclerosis; Cathodes; Couplings; Electron sources; Ion beams; Ion sources; Spin valves; Sputtering; Substrates; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International

Conference_Location

Toronto, ON, Canada

Print_ISBN

0-7803-5943-7

Type

conf

DOI

10.1109/INTMAG.2000.872002

Filename

872002