مرکز منطقه ای اطلاع رساني علوم و فناوري - Thin film processing by biased target ion beam deposition

DocumentCode :

357225

Title :

Thin film processing by biased target ion beam deposition

Author :

Hylton, T.L. ; Baldwin, D. ; Ciorneiu, B. ; Escorcia, O. ; Son, J. ; McClure, M. ; Waters, G.

Author_Institution :

CVC, Inc.

fYear :

2000

fDate :

9-13 April 2000

Firstpage :

224

Lastpage :

224

Keywords :

Atherosclerosis; Cathodes; Couplings; Electron sources; Ion beams; Ion sources; Spin valves; Sputtering; Substrates; Transistors;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International

Conference_Location :

Toronto, ON, Canada

Print_ISBN :

0-7803-5943-7

Type :

conf

DOI :

10.1109/INTMAG.2000.872002

Filename :

872002

Link To Document :