Results of Monolithic Integration of Optical Waveguides, Photodiodes and CMOS Circuits on Silicon

Optical devices like waveguides, beam splitters and Mach-Zehnder interferometers are integrated on silicon substrate. To reduce the silicon area necessary for waveguide curvatures integrated mirrors are applied. The optical components are coupled to CMOS amplifiers and digital circuits via photodetectors in a monolithic integration technique on a single silicon chip. Measurement results of the optical structures, the coupling characteristics of waveguides to photodiodes and of complete system operation are given.