DocumentCode
3572791
Title
On-wafer high-frequency device characterization
Author
Koolen, M.C.A.M.
Author_Institution
Philips Research laboratories, P.O. Box 80.000, 5600 JA Eindhoven, The Netherlands
fYear
1992
Firstpage
679
Lastpage
686
Abstract
As device size decreases and operation speed increases, the demands posed to the techniques for calibration and correction for high-frequency characterization of IC-components become more stringent. At the same time the importance of high-frequency characterization increases since device behavior can no longer be sufficiently well predicted using low-frequency measurements only. Small-signal high-frequency measurements then provide extra information for device characterization.
Keywords
Calibration; Capacitance measurement; Frequency measurement; Impedance measurement; Length measurement; Loss measurement; Microwave measurements; Size measurement; Time measurement; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Print_ISBN
444894780
Type
conf
Filename
5435384
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