Title :
Research on the control system of the active isolation system
Author :
Yun Liu ; Junli Li ; Yuebin Zhu
Author_Institution :
Mech. Eng. Dept., Shanghai Micro Electron. Equip. Co., Ltd., Shanghai, China
Abstract :
Generally, feedback control is used to reduce the resonances of the isolator and floor feedforward control is added to improve the transmissibility further. The manual iterative method is used to calibrate the gain of the floor feedforward control. This method is time-consumed and not easy to tune. A new calibration method which is based on transmissibility and force mobility is proposed. The test results show that the proposed method works well.
Keywords :
calibration; feedback; feedforward; vibration isolation; active isolation system; control system; feedback control; floor feedforward control gain calibration; force mobility; isolator resonance reduction; iterative method; transmissibility improvement; Automation; Control systems; Electronic equipment; Feedforward neural networks; Floors; Intelligent control; Mechanical engineering; active control; floor feedforward; isolator;
Conference_Titel :
Intelligent Control and Automation (WCICA), 2014 11th World Congress on
DOI :
10.1109/WCICA.2014.7053123
