DocumentCode :
357312
Title :
Evaluation of lot release policies for semiconductor manufacturing systems
Author :
Sandell, Raka ; Srinivasan, Krishna
Author_Institution :
Motorola Inc.
fYear :
1996
fDate :
1996
Firstpage :
1014
Lastpage :
1022
Keywords :
Application specific integrated circuits; Integrated circuit measurements; Job shop scheduling; Manufacturing industries; Manufacturing systems; Optimal scheduling; Pollution measurement; Production facilities; Semiconductor device manufacture; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference, 1996. Proceedings. Winter
Print_ISBN :
0-7803-3383-7
Type :
conf
DOI :
10.1109/WSC.1996.873398
Filename :
873398
Link To Document :
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