DocumentCode :
357313
Title :
An investigation of operating methods for 0.25 micron semiconductor manufacturing
Author :
Hallas, James F. ; Kim, Jane D. ; Mosier, Charles T. ; Internicola, Carolyn
Author_Institution :
Texas Instruments
fYear :
1996
fDate :
1996
Firstpage :
1023
Lastpage :
1030
Keywords :
Costs; Fabrication; Management training; Measurement; Production facilities; Productivity; Qualifications; Semiconductor device manufacture; Semiconductor device modeling; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference, 1996. Proceedings. Winter
Print_ISBN :
0-7803-3383-7
Type :
conf
DOI :
10.1109/WSC.1996.873399
Filename :
873399
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=357313
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