DocumentCode
3573685
Title
New Method for the Extraction of the Gate Voltage Dependence of the Series Resistance in CMOS Transistors
Author
Brut, H. ; Ghibaudo, G. ; Juge, A.
Author_Institution
SGS-THOMSON Microelectronics BP 16, 38921 Crolles, France; LPCS, ENSERG, BP 257, 38016 Grenoble, France
fYear
1996
Firstpage
675
Lastpage
678
Abstract
The resistance based extraction method for the determination of effective channel length and series resistance behaviour with gate bias is critically analysed. The impossibility of extracting the gate voltage variations of these parameters concurrently is demonstrated. Then both new approach and parameter extraction procedure are given and experimentally applied to several technologies from 1.2¿m down to 0.35¿m technologies.
Keywords
CMOS process; CMOS technology; Circuit synthesis; Design engineering; Linear predictive coding; MOS devices; Microelectronics; Parameter extraction; Semiconductor device modeling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Print_ISBN
286332196X
Type
conf
Filename
5436076
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