Title :
All-Silicon Thermo-Optic Micro-Modulator
Author :
Cocorullo, G. ; Iodice, M. ; Rendina, I. ; Sarro, P.M.
Author_Institution :
Istituto di Ricerca per l´´Elettromagnetismo e i Componenti Elettronici, Consiglio, Nazionale delle Ricerche, Via Diocleziano 328, 80124 Napoli, Italy; Dipartimento di Ingegneria Elettronica, Informatica e Sistemistica, Universit?ƒ\xa0 della Calabria, 870
Abstract :
A silicon 50-¿m-long Fabry-Perot waveguide modulator, based on the thermo-optic effect and electrically driven, has been entirely fabricated using microelectronic techmiques. The device is thought for direct integration with electronic circuits because the planar optical cavity has been defined by plasma etching and not by cleaveage of the chip. Operation at frequencies up to about 2 MHz has been demonstrated at the wavelength of 1.55 ¿m. This is by far the best result ever reported, to our knowledge, for termo-optic effect based modulators. The device could match the features requested for several low-cost low-performance fiber optic applications.
Keywords :
Electronic circuits; Fabry-Perot; Integrated optics; Microelectronics; Optical devices; Optical modulation; Optical waveguides; Plasma applications; Silicon; Thermooptic effects;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
