• DocumentCode
    3574520
  • Title

    Signal conditioning unit for piezoresistive based micro pressure sensors

  • Author

    Sonkar, Shailendra Kumar ; Suja, K.J. ; Swapna Krishnan, J.

  • Author_Institution
    Dept. of ECE, NIT Calicut, Calicut, India
  • fYear
    2014
  • Firstpage
    1279
  • Lastpage
    1283
  • Abstract
    Silicon piezoresistors are widely used in fabrication of micro pressure sensors and accelerometers. The problem associated with silicon based piezoresistive micro sensors is the dependency of resistance on temperature resulting in large thermal drift. This project is aiming to design a low cost signal conditioner to compensate the thermal drift prevailing inherently in the piezoresistive pressure sensors configured in Wheatstone bridge structure. This method provides digital approach to compensate thermal drift having better performance than Analog approach. Using the signal conditioner linearity improvement and offset compensation is achieved at the desired sensitivity.
  • Keywords
    accelerometers; compensation; microfabrication; microsensors; piezoresistive devices; pressure sensors; signal conditioning circuits; silicon; Si; Wheatstone bridge structure; accelerometer; offset compensation; signal conditioner linearity improvement; signal conditioning unit; silicon based piezoresistive pressure microsensor fabrication; thermal drift compensation; Calibration; Interpolation; Piezoresistance; Sensitivity; Temperature; Temperature sensors; MPX10GP; interpolation method; percentage error; piezoresistive sensor; sensitivity; temperature compensation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuit, Power and Computing Technologies (ICCPCT), 2014 International Conference on
  • Print_ISBN
    978-1-4799-2395-3
  • Type

    conf

  • DOI
    10.1109/ICCPCT.2014.7055013
  • Filename
    7055013