Title :
Reliability characterization of a soot particle sensor: Analysis of stress- and electromigration in thin-film platinum
Author :
Rusanov, Radoslav ; Graf, Juergen ; Rank, Holger ; Fuchs, Tino ; Mueller-Fiedler, Roland ; Kraft, Oliver
Author_Institution :
Microsyst. Technol., Robert Bosch GmbH, Gerlingen-Schillerhoehe, Germany
Abstract :
In this work we present a systematic investigation of failure mechanisms for thin-film platinum heater structures and interdigitated electrodes as components of a resistive type soot particle sensor. We study stress-migration and electromigration and effects of their interaction. Lifetime determination and SEM imaging are applied for samples which have experienced different load conditions to quantitatively and qualitatively understand the phenomena. We use dedicated, application-related test structures to ensure that the results are transferable to sensor lifetime estimations.
Keywords :
electrochemical electrodes; electromigration; failure analysis; particle detectors; platinum; reliability; scanning electron microscopy; soot; stress analysis; thin film sensors; Pt; SEM imaging; application-related test structure; electromigration; failure mechanism; interdigitated electrode; reliability characterization; resistive type soot particle sensor; stress-migration analysis; thin-film platinum heater structure; Current density; Electromigration; Feeds; Heating; Materials; Plasma temperature; Platinum; MEMS; electromigration; harsh environment; platinum; reliability; soot particle sensor; stress-migration;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056639
