Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers

Author

Possas, Maira ; Rousseau, Lionel ; Ghassemi, Farbod ; Lissorgues, Gaelle ; Scorsone, Emmanuel ; Bergonzo, Philippe

Author_Institution

ESYCOM, Univ. Paris-Est, Noisy le Grand, France

fYear

2014

Firstpage

1

Lastpage

5

Abstract

The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young´s Modulus mean value of polycrystalline diamond cantilever was estimated from these tests at 950-1100GPa.

Keywords

CVD coatings; Young´s modulus; bioMEMS; cantilevers; diamond; microfabrication; C; CVD diamond; Young modulus; bending test; biochemical applications; contact surface profilometer; laser Doppler vibrometer; microcantilever fabrication; micromechanical characterization; polycrystalline diamond cantilever; polycrystalline diamond microcantilever; pressure 950 GPa to 1100 GPa; resonant MEMS; resonant test; Diamonds; Fabrication; Force; Materials; Micromechanical devices; Resonant frequency; Microcantilevers; Micromechanical test; Polycrystalline Diamond; Surface Profilometer; Young´s modulus;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on

Print_ISBN

978-2-35500-028-7

Type

conf

DOI

10.1109/DTIP.2014.7056658

Filename

7056658