• DocumentCode
    3574975
  • Title

    Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors

  • Author

    Brenes, A. ; Juillard, J. ; dos Santos, F. Vinci

  • Author_Institution
    THALES Avionics, Valence, France
  • fYear
    2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The aim of this paper is to introduce an explanation for the amplitude saturation and inhibition phenomena in resonant MEMS pressure sensors, via the electrostatic coupling of two resonance modes. Our analysis and experimental results reveal that these phenomena may be ubiquitous in electrostatic resonant MEMS sensors.
  • Keywords
    crosstalk; microsensors; pressure sensors; electrostatic coupling; electrostatically-induced modal crosstalk phenomena; resonance modes; resonant MEMS pressure sensors; Couplings; Electrostatics; Mathematical model; Micromechanical devices; Oscillators; Sensor phenomena and characterization; Autoparametric resonance; electrostatic nonlinearity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
  • Print_ISBN
    978-2-35500-028-7
  • Type

    conf

  • DOI
    10.1109/DTIP.2014.7056659
  • Filename
    7056659
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3574975