• DocumentCode
    3574977
  • Title

    High acoustic performance MEMS microspeaker

  • Author

    Sassine, Gilbert ; Shahosseini, Iman ; Woytasik, Marion ; Martincic, Emile ; Moulin, Johan ; Lefeuvre, Elie ; Houdouin, Alexandre ; Durand, Stephane ; Yaakoubi, Nourdin

  • Author_Institution
    Inst. d´Electron. Fondamentale, Univ. Paris Sud, Orsay, France
  • fYear
    2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this paper, a theoretical approach for the electrodynamic motor optimization has been presented. The analytical simulations of the electroacoustic efficiency were validated with an experimental measurements were we have seen a very good agreement. The same assembled device was characterized in an anechoic chamber, where we have detected an SPL around 80 dB for 0.5 W.
  • Keywords
    acoustic devices; micromechanical devices; MEMS microspeaker; SPL; anechoic chamber; electroacoustic efficiency; electrodynamic motor optimization; power 0.5 W; Coils; Force; Magnetic flux; Magnetoacoustic effects; Micromechanical devices; Optimization; Silicon; Acoustic MEMS; Electrodynamic Presentation type; Microspeaker; Oral;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
  • Print_ISBN
    978-2-35500-028-7
  • Type

    conf

  • DOI
    10.1109/DTIP.2014.7056661
  • Filename
    7056661