Title :
High acoustic performance MEMS microspeaker
Author :
Sassine, Gilbert ; Shahosseini, Iman ; Woytasik, Marion ; Martincic, Emile ; Moulin, Johan ; Lefeuvre, Elie ; Houdouin, Alexandre ; Durand, Stephane ; Yaakoubi, Nourdin
Author_Institution :
Inst. d´Electron. Fondamentale, Univ. Paris Sud, Orsay, France
Abstract :
In this paper, a theoretical approach for the electrodynamic motor optimization has been presented. The analytical simulations of the electroacoustic efficiency were validated with an experimental measurements were we have seen a very good agreement. The same assembled device was characterized in an anechoic chamber, where we have detected an SPL around 80 dB for 0.5 W.
Keywords :
acoustic devices; micromechanical devices; MEMS microspeaker; SPL; anechoic chamber; electroacoustic efficiency; electrodynamic motor optimization; power 0.5 W; Coils; Force; Magnetic flux; Magnetoacoustic effects; Micromechanical devices; Optimization; Silicon; Acoustic MEMS; Electrodynamic Presentation type; Microspeaker; Oral;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056661
