DocumentCode
3574982
Title
Design and test of resonators using PiezoMUMPS technology
Author
Pons-Nin, Joan ; Gorreta, Sergi ; Dominguez, Manuel ; Blokhina, Elena ; O´Connell, Diarmuid ; Feely, Orla
Author_Institution
Electron. Eng. Dept., Tech. Univ. of Catalonia, Barcelona, Spain
fYear
2014
Firstpage
1
Lastpage
6
Abstract
This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.
Keywords
MUMPS; crystal resonators; micromechanical devices; oscillators; vibrations; PDO; PiezoMUMPS process; PiezoMUMPS technology; mechanical vibration modes; piezoelectric MEMS; pulsed digital oscillators; resonators; Finite element analysis; Micromechanical devices; Oscillators; Piezoelectric devices; Publishing; Resonant frequency; Vibrations; MEMS resonators; Piezo-MEMS; mechanical modes;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN
978-2-35500-028-7
Type
conf
DOI
10.1109/DTIP.2014.7056666
Filename
7056666
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