• DocumentCode
    3574990
  • Title

    A comparative study of reduced-order modeling techniques for nonlinear MEMS beams

  • Author

    Juillard, Jerome

  • Author_Institution
    E3S, SUPELEC, Gif-sur-Yvette, France
  • fYear
    2014
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    This paper is dedicated to the comparison of three techniques of reduced-order modeling (ROM) that may be applied to MEMS beams subject to nonlinear damping and restoring forces. These methods are compared in terms of simplicity and accuracy, in the static, transient and steady-state regimes. It is shown that one of the most popular ROM methods may lead to dramatically wrong results in the case of single-mode decomposition.
  • Keywords
    damping; micromechanical devices; reduced order systems; ROM method; microelectromechanical system; nonlinear MEMS beam; nonlinear damping; reduced-order modeling technique; restoring force; single-mode decomposition; static regimes; steady-state regime; transient regime; Damping; Frequency response; Mathematical model; Micromechanical devices; Polynomials; Steady-state; Transient analysis; Reduced-order modeling; electrostatic nonlinearity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
  • Print_ISBN
    978-2-35500-028-7
  • Type

    conf

  • DOI
    10.1109/DTIP.2014.7056674
  • Filename
    7056674