DocumentCode
3574990
Title
A comparative study of reduced-order modeling techniques for nonlinear MEMS beams
Author
Juillard, Jerome
Author_Institution
E3S, SUPELEC, Gif-sur-Yvette, France
fYear
2014
Firstpage
1
Lastpage
5
Abstract
This paper is dedicated to the comparison of three techniques of reduced-order modeling (ROM) that may be applied to MEMS beams subject to nonlinear damping and restoring forces. These methods are compared in terms of simplicity and accuracy, in the static, transient and steady-state regimes. It is shown that one of the most popular ROM methods may lead to dramatically wrong results in the case of single-mode decomposition.
Keywords
damping; micromechanical devices; reduced order systems; ROM method; microelectromechanical system; nonlinear MEMS beam; nonlinear damping; reduced-order modeling technique; restoring force; single-mode decomposition; static regimes; steady-state regime; transient regime; Damping; Frequency response; Mathematical model; Micromechanical devices; Polynomials; Steady-state; Transient analysis; Reduced-order modeling; electrostatic nonlinearity;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN
978-2-35500-028-7
Type
conf
DOI
10.1109/DTIP.2014.7056674
Filename
7056674
Link To Document