Title :
Millimeterwave micro-coax development using simplified 3D fabrication process
Author :
Vahabisani, Nahid ; Daneshmand, Mojgan
Author_Institution :
ECE Dept., Univ. of Alberta, Edmonton, AB, Canada
Abstract :
This paper presents the development of 3D millimeter-wave half-coax devices through a simplified 3 mask layer monolithic wafer-level micro-fabrication process. As the result of this fabrication technology, a whole variety of on-wafer RF MEMS devices including 2D and 3D structures can be fabricated and integrated on a single die.
Keywords :
microfabrication; micromechanical devices; millimetre wave devices; 2D structures; 3D millimeter-wave half-coax devices; 3D structures; millimeter wave micro-coax development; monolithic wafer-level micro-fabrication; on-wafer RF MEMS devices; Conductors; Coplanar waveguides; Fabrication; Metals; Micromechanical devices; Millimeter wave technology; Three-dimensional displays; Half-coax; millimeter-wave; monolithic; wafer-level;
Conference_Titel :
Millimeter-Wave and Terahertz Technologies (MMWATT), 2014 Third Conference on
Print_ISBN :
978-1-4799-6590-8
DOI :
10.1109/MMWaTT.2014.7057193
