Title :
A novel simple 3D SU8 prism-SOI waveguide interface for light coupling improvement
Author :
Minh-Hang Nguyen ; Tuan-Hung Nguyen ; Hai-Binh Nguyen ; Fan-Gang Tseng ; Jain-Ren Lai ; Ming-Chang Lee ; Kai-Ning Ku
Author_Institution :
Center for Microelectron. & Inf. Technol., Nat. Center for Technol. Progress, Hanoi, Vietnam
Abstract :
This paper presents optimized structural interface between 3D SU8 prism and SOI waveguide for reduced coupling loss at the interface, hence increasing light transmission efficiency over the system. The coupling loss reduced to 10 % at each optimized interface thanks to SU8 overlap on tip of SOI waveguide and partly etched BOX under the interface. With large tolerance up to 5 μm, the interface can be easily fabricated.
Keywords :
integrated optics; optical couplers; optical fabrication; optical losses; optical prisms; optical waveguides; silicon-on-insulator; Si; light coupling improvement; light transmission efficiency; optimized structural interface; partly etched BOX; reduced coupling loss; simple 3D SU8 prism-SOI waveguide interface; Couplings; Monitoring; Optical fibers; Propagation losses; Silicon; Three-dimensional displays; SOI waveguide; SU8 prism; coupling; interface; transmission;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
DOI :
10.1109/3M-NANO.2014.7057306
