Ultrasonic assisted imprint for microfluidic chips

Microfluidic chips are new MEME devices built on several square millimeter substrate to handle microliter or nanoliter fluid, wildly used in the fields of life science and bio-chemical detection, with the advantages of low reagents consuming, high efficiency and low cost. In the highly integrated microfluidic chips, flow sensors are essential parts; however, most traditional flow sensors are not suitable to be integrated into microfluidic chips, because of their complex fabrication process and high cost. In this paper, a new thermal sensitive element on polymer foil is fabricated by ultrasonic assistant imprint technology and integrated into microfluidic chip to be an anemometer flow sensor. Then the anemometer flow sensor is experimentally studied under power constant condition and the experiment shows application potential in the microfluidic chips.