Title :
Design of a dual- probe profilometer
Author :
Chiao-Hua Cheng ; Shao-Kang Hung ; Chih-Hsien Lin
Author_Institution :
Dept. of Mech. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
This paper proposes a design of a dual-probe profilometer, which successfully utilizes a compensation method with two probe modules to scan a 200 nm step height standard sample with 5% scanning error. Compared with traditional profilometers, this design possesses high scanning precise performance without using large and heavy optical flats to increase the flatness when sample stage is moving. The experimental results show the compensation method is valid and can be applied in nano-scale scanning.
Keywords :
compensation; surface topography measurement; compensation method; distance 200 nm; dual-probe profilometer; nanoscale scanning; optical flat; Adaptive optics; Distortion measurement; Optical distortion; Optical reflection; Optical sensors; Probes; Surface topography; nanopositioner; optical lever; profilometer;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
DOI :
10.1109/3M-NANO.2014.7057334
