The effects of offset on quality factor of MEMS wine-glass resonator

Author

Linxi Dong ; Jinyan Bao ; Ying Pan ; Huiquan Wang

Author_Institution

Key Lab. of RF Circuits & Syst. of Minist., Hangzhou Dianzi Univ., Hangzhou, China

fYear

2014

Firstpage

28

Lastpage

31

Abstract

The effects of the offset on the performance of MEMS disk resonator have been analyzed first, then considering the special construction of the MEMS wine-glass resonator, the computing equation of the quality factor has been obtained after establishing the disk-electrode modal. And its accuracy has been demonstrated through a comparison between the standard value and the computation value. Finally, using the equation to calculate the quality factor of different offset situations and then analyzing the results, it is found that the quality factor has degradation with an increase in the offsets, for example, an offset of 50% in the disk results in 35.3% degradation in the quality factor.

Keywords

Q-factor; micromechanical resonators; MEMS disk resonator; MEMS wine-glass resonator; disk-electrode modal; offset effects; quality factor; Capacitance; Electrodes; Equations; Mathematical model; Micromechanical devices; Optical resonators; Q-factor; Disk resonator; MEMS; offset; quality factor;

fLanguage

English

Publisher

ieee

Conference_Titel

Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on

Type

conf

DOI

10.1109/3M-NANO.2014.7057350

Filename

7057350