DocumentCode
3575691
Title
Nanobubbles in ion-implanted solids
Author
Donnelly, S.E.
Author_Institution
Sch. of Comput. & Eng., Univ. of Huddersfield, Huddersfield, UK
fYear
2014
Firstpage
18
Lastpage
22
Abstract
A brief review is presented of current understanding of inert gas nanobubbles in solids in order to permit parallels and contrasts to be made with the recent topic of nanobubbles at solid/liquid interfaces. In particular, the concept of equilibrium and overpresssurized bubbles is discussed and some results are presented on the experimental determination of pressure in nanobubbles. Finally, examples are presented of different bubble morphologies including platelets and bubble superlattices.
Keywords
bubbles; inert gases; ion implantation; nanostructured materials; pressure; superlattices; bubble morphologies; bubble superlattices; equilibrium; inert gas nanobubbles; ion-implanted solids; overpresssurized bubbles; platelets; semiconductor industry; solid-liquid interfaces; Helium; Niobium; Silicon; Solids; Nanobubbles; inert gases; ion-implantation; solids;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
Type
conf
DOI
10.1109/3M-NANO.2014.7057355
Filename
7057355
Link To Document