Nano-positioning with sliding mode based control for piezoelectric actuators

This paper compares three sliding mode control laws for nano-positioning systems using piezoelectric actuators (PEAs), where the hysteresis nonlinearity can be viewed as the uncertainties of the system. Compared with the other control laws, sliding mode based controllers (SMC) are proved to be an effective method that specifically appealing to uncertainties and disturbances. To avoid the chattering drawback of conventional SMC, the three methods compared in this paper use different techniques to achieve the chattering-free control of PEAs. The stability of the three controllers is validated based on the Lyapunov stability theory. The numerical results show that the adaptive PI-based sliding mode controller (APISMC) and terminal sliding mode controller (TSMC) can both achieve better dynamic and static performance comparing to the PID-based SMC (PIDSMC), while APISMC offers the faster response and smaller tracking error but with larger overshoot.