• DocumentCode
    3577820
  • Title

    Ferroelectric Hafnium Oxide A Game Changer to FRAM?

  • Author

    Muller, Johannes ; Polakowski, Patrick ; Riedel, Stefan ; Mueller, Stefan ; Yurchuk, Ekaterina ; Mikolajick, Thomas

  • Author_Institution
    Fraunhofer IPMS, Dresden, Germany
  • fYear
    2014
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    In this paper the potential of hafnium oxide as a CMOS-compatible ferroelectric for future memory applications is assessed. The high coercive field strength of ferroelectric hafnium oxide is identified as a key parameter being crucial to device performance. It provides the unique thickness and lateral scaling potential of this novel ferroelectric, while at the same time compromises its endurance properties due to large switching fields. Considering the ambivalent nature of this parameter as well as the emerging trade-off between retention and endurance, voltage controlled operation modes and different device concepts for ferroelectric hafnium oxide are discussed.
  • Keywords
    ferroelectric storage; hafnium compounds; integrated circuit modelling; random-access storage; CMOS-compatible ferroelectric; FRAM; HfO2; ferroelectric hafnium oxide; memory applications; switching fields; voltage controlled operation modes; Capacitors; Ferroelectric films; Hafnium oxide; Logic gates; Nonvolatile memory; Random access memory; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Non-Volatile Memory Technology Symposium (NVMTS), 2014 14th Annual
  • Print_ISBN
    978-1-4799-4203-9
  • Type

    conf

  • DOI
    10.1109/NVMTS.2014.7060838
  • Filename
    7060838