Design of ultra-compact 60-GHz millimeter-wave CMOS on-chip bandpass filter with two controllable transmission zeros

An ultra-compact 60-GHz millimeter-wave on-chip bandpass filter (BPF) is proposed and fabricated with 18-µm standard CMOS process. The design method helps achieve not only efficient size reduction but also two controllable transmission zeros located on both sides of the passband. One transmission zero is produced by a coupled line structure, whereas the other one is produced owing to the appearance of a parasitic inductor. Therefore, the proposed BPF can obtain a better cutoff rate in the edges of the passband and provide much improved skirt selectivity. The entire chip size of the proposed filter is 0.182 × 0.566 mm², and the core size is 0.062 × 0.556 mm². The proposed filter with a center frequency of 60 GHz has an insertion loss of less than 3.5-dB. A good agreement between the simulation and measurement results is observed.