Title :
Fabrication of 180 GHz PTFE-filled waveguide and its bandpass filters by SR direct etching
Author :
Kishihara, M. ; Sasaki, R. ; Yamamoto, T. ; Yamaguchi, A. ; Utsumi, Y. ; Ohta, I.
Author_Institution :
Okayama Prefectural University, Soja, 719-1197 Japan
Abstract :
Micro RF parts and components have recently been developed by various microfabrication technologies. This paper treats a trial fabrication of the PTFE-filled waveguide for short millimeter-wave with the use of the SR (synchrotron radiation) etching process of PTFE. First, PTFE-filled waveguides of different lengths for 180 GHz operation are fabricated, and the propagation losses are evaluated using the measurement results. Next, iris-coupled bandpass filters (BPF) with 3- and 5-stage Chebyshev responses are designed and fabricated. The frequency characteristics of the PTFE-filled waveguide BPFs are measured, and the validity of the fabrication process is confirmed.
Keywords :
Decision support systems; Frequency measurement; Length measurement; Loss measurement; Microwave theory and techniques; Propagation losses; Q measurement; Bandpass filters; X-ray lithography; dielectric loaded waveguides; sputtering; waveguide components;
Conference_Titel :
Microwave Conference (APMC), 2014 Asia-Pacific
