Title :
A novel vacuum filling process for polymeric optical waveguide fabrication
Author :
Xu, Tao ; Li, Guann-Pyng ; Bachman, Mark ; Lai, Zhian ; Yang, Yang
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Irvine, CA, USA
Abstract :
A novel vacuum filling process for polymeric optical waveguide fabrication has been presented in this paper. The polymeric optical waveguides fabricated by this process have successfully been obtained. Some initial tests about the polymeric waveguide have been done. The testing results indicate that the polymeric waveguide has high quality, while the process is simple, low-cost, easy to fabricate channel waveguide, good for mass production, and suitable for almost all polymers.
Keywords :
etching; integrated optics; moulding; optical communication equipment; optical fabrication; optical losses; optical polymers; optical testing; optical waveguides; photolithography; channel waveguide; high quality; low-cost; mass production; optical testing results; polymeric optical waveguide fabrication; vacuum filling process; Etching; Filling; Lithography; Optical device fabrication; Optical polymers; Optical waveguides; Ovens; Semiconductor waveguides; Silicon; Writing;
Conference_Titel :
Optical Fiber Communication Conference and Exhibit, 2002. OFC 2002
Print_ISBN :
1-55752-701-6
DOI :
10.1109/OFC.2002.1036172
