DocumentCode
3585412
Title
Table of contents
fYear
2014
Firstpage
1
Lastpage
2
Abstract
The following topics are dealt with: WIP management; scheduling; statistical imputation; daily production target setting; advanced process control; inspection; semiconductor manufacturing and tool monitoring.
Keywords
condition monitoring; inspection; process control; scheduling; semiconductor device manufacture; work in progress; WIP management; advanced process control; daily production target setting; inspection; scheduling; semiconductor manufacturing; statistical imputation; tool monitoring;
fLanguage
English
Publisher
ieee
Conference_Titel
e-Manufacturing and Design Collaboration Symposium (eMDC), 2014
Type
conf
Filename
7081704
Link To Document