Title :
Table of contents
Abstract :
The following topics are dealt with: WIP management; scheduling; statistical imputation; daily production target setting; advanced process control; inspection; semiconductor manufacturing and tool monitoring.
Keywords :
condition monitoring; inspection; process control; scheduling; semiconductor device manufacture; work in progress; WIP management; advanced process control; daily production target setting; inspection; scheduling; semiconductor manufacturing; statistical imputation; tool monitoring;
Conference_Titel :
e-Manufacturing and Design Collaboration Symposium (eMDC), 2014
