Title :
Comparitive analysis of capacitive type MEMS pressure sensor for altitude sensing
Author :
Maniraman, P. ; Chitra, L.
Author_Institution :
Dept. of Mechatron. Eng., Aarupadai Veedu Inst. of Technol., Chennai, India
Abstract :
This paper reports on comparison, selection, design and simulation of various types of MEMS based capacitive type pressure sensor for altitude measurement. The widely used capacitive type pressure sensor is analyzed by simulating its diaphragm deflection, capacitance change etc. for a pressure range of 0-1.1 MPa (Mega Pascal) and its merits and demerits are discussed. Also a new design is proposed to overcome the demerits of capacitive sensor.
Keywords :
capacitive sensors; diaphragms; height measurement; microsensors; pressure sensors; MEMS based capacitive type pressure sensor; altitude measurement; capacitance change; diaphragm deflection; pressure 0.1 MPa to 1 MPa; Capacitance; Capacitive sensors; Capacitors; Electrodes; Gold; Micromechanical devices; Sensitivity; Capacitive pressure sensor; Comb drive pressure sensor; MEMS Altimeter; MEMS pressure sensor; Micro sensor;
Conference_Titel :
Emerging Trends In New & Renewable Energy Sources And Energy Management (NCET NRES EM), 2014 IEEE National Conference On
Print_ISBN :
978-1-4799-8193-9
DOI :
10.1109/NCETNRESEM.2014.7088766
