Title :
Development of 6DOF nano-precision stewart platform for nano-milling application
Author :
Tho Van Nguyen ; Yung Ting ; Leorna, Mark
Author_Institution :
Dept. of Mech. Eng., Chung Yuan Christian Univ., Chungli, Taiwan
Abstract :
With the vast interest and demand for nano-scale precision, piezoelectric actuators become the main driving resource for its minimized and high precision capability. In this study, a composite controller integrated with feedforward control and feedback control designed from a PID with optimal gain is utilized. The application of nano-milling was performed to examine and observe the comparison of the efficacy of tracking performance of the designed controls.
Keywords :
control system synthesis; feedback; feedforward; milling; nanotechnology; piezoelectric actuators; three-term control; 6DOF nano-precision Stewart platform; PID control; composite controller; feedback control; feedforward control; nanomilling application; piezoelectric actuators; Bismuth; Feedforward neural networks; Force; Hysteresis; Joints; Kinematics; Piezoelectric actuators;
Conference_Titel :
Robotics and Biomimetics (ROBIO), 2014 IEEE International Conference on
DOI :
10.1109/ROBIO.2014.7090612
