Spectrum-based model reduction of rapid thermal processing system

In order to study the temperature distribution on the wafer in a rapid thermal processing system, we develop a reduced model of the dynamic based on the spectrum of the system operator. The dominant modes of the system are extracted through the analysis of the spectrum. Galerkin´s method is utilized to construct the reduced model of the system with the dominant modes as the trial functions. Simulations are performed by comparing the high-order model with the proposed reduced model. Simulation results show that the proposed reduced model has relatively small order but the same ability to model the process.