• DocumentCode
    3590522
  • Title

    Resonant field emission in multilayer cathodes with quantum well

  • Author

    Goncharuk, N.M. ; Chayka, V.E. ; Litovchenko, V.G. ; Evtukh, A.A. ; Litvin, Yu.M.

  • Author_Institution
    Res. Inst. Orion, Acad. of Sci., Kiev, Ukraine
  • Volume
    1
  • fYear
    1998
  • fDate
    6/20/1905 12:00:00 AM
  • Firstpage
    272
  • Abstract
    Experimental investigations of electron field emission from multilayer cathodes (MLC) have been performed using silicon tip emitters. Silicon tips were prepared with wet etching of silicon and following sharpening by thermal oxidation. During the electron field emission into vacuum, measurements of the resonant tunneling have been observed for some MLC structures
  • Keywords
    cathodes; electron field emission; elemental semiconductors; resonant tunnelling; semiconductor quantum wells; silicon; silicon compounds; vacuum microelectronics; MLC structures; Si-SiO2; electron field emission; multilayer cathodes; quantum well; resonant field emission; resonant tunneling; silicon tip emitters; thermal oxidation; vacuum; wet etching; Cathodes; Current density; Electron emission; Nonhomogeneous media; Physics; Quantum mechanics; Resonance; Resonant tunneling devices; Space charge; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physics and Engineering of Millimeter and Submillimeter Waves, 1998. MSMW '98. Third International Kharkov Symposium
  • Print_ISBN
    0-7803-5553-9
  • Type

    conf

  • DOI
    10.1109/MSMW.1998.758978
  • Filename
    758978