Title :
Resonant field emission in multilayer cathodes with quantum well
Author :
Goncharuk, N.M. ; Chayka, V.E. ; Litovchenko, V.G. ; Evtukh, A.A. ; Litvin, Yu.M.
Author_Institution :
Res. Inst. Orion, Acad. of Sci., Kiev, Ukraine
fDate :
6/20/1905 12:00:00 AM
Abstract :
Experimental investigations of electron field emission from multilayer cathodes (MLC) have been performed using silicon tip emitters. Silicon tips were prepared with wet etching of silicon and following sharpening by thermal oxidation. During the electron field emission into vacuum, measurements of the resonant tunneling have been observed for some MLC structures
Keywords :
cathodes; electron field emission; elemental semiconductors; resonant tunnelling; semiconductor quantum wells; silicon; silicon compounds; vacuum microelectronics; MLC structures; Si-SiO2; electron field emission; multilayer cathodes; quantum well; resonant field emission; resonant tunneling; silicon tip emitters; thermal oxidation; vacuum; wet etching; Cathodes; Current density; Electron emission; Nonhomogeneous media; Physics; Quantum mechanics; Resonance; Resonant tunneling devices; Space charge; Temperature;
Conference_Titel :
Physics and Engineering of Millimeter and Submillimeter Waves, 1998. MSMW '98. Third International Kharkov Symposium
Print_ISBN :
0-7803-5553-9
DOI :
10.1109/MSMW.1998.758978
