DocumentCode
3590522
Title
Resonant field emission in multilayer cathodes with quantum well
Author
Goncharuk, N.M. ; Chayka, V.E. ; Litovchenko, V.G. ; Evtukh, A.A. ; Litvin, Yu.M.
Author_Institution
Res. Inst. Orion, Acad. of Sci., Kiev, Ukraine
Volume
1
fYear
1998
fDate
6/20/1905 12:00:00 AM
Firstpage
272
Abstract
Experimental investigations of electron field emission from multilayer cathodes (MLC) have been performed using silicon tip emitters. Silicon tips were prepared with wet etching of silicon and following sharpening by thermal oxidation. During the electron field emission into vacuum, measurements of the resonant tunneling have been observed for some MLC structures
Keywords
cathodes; electron field emission; elemental semiconductors; resonant tunnelling; semiconductor quantum wells; silicon; silicon compounds; vacuum microelectronics; MLC structures; Si-SiO2; electron field emission; multilayer cathodes; quantum well; resonant field emission; resonant tunneling; silicon tip emitters; thermal oxidation; vacuum; wet etching; Cathodes; Current density; Electron emission; Nonhomogeneous media; Physics; Quantum mechanics; Resonance; Resonant tunneling devices; Space charge; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Physics and Engineering of Millimeter and Submillimeter Waves, 1998. MSMW '98. Third International Kharkov Symposium
Print_ISBN
0-7803-5553-9
Type
conf
DOI
10.1109/MSMW.1998.758978
Filename
758978
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