Modeling and Simulation of the Ultra-Micro Mass Measure System

At present, no mature methods are available to detect discrete single-little flow or ultra-micro mass at home or abroad. But with scanning tunnel microscope, atom force microscope and laser measure technique, we can measure tiny displacement, and the measure precision can reach nanometer level. Based on this, we put forward a method to measure ultra-micro mass. It converted the measure of the ultra-micro mass into the measure of the ultra-micro angle through a conversion device. It adopted high accuracy and high rotary micro-aerostatic bearing as the main shaft of the conversion device. And it employed laser triangular device to convert tiny angle into tiny electric signal, then the measure circuit collected and amplified the tiny electric signal, after the digital processing and power amplification, the electric signal was exported to control the piezoelectric ceramic feedback actuator, which controls the balance of the beam. Thus a closed loop system was formed, raising the systematic precision and stability. We gave out the structure, the working principle and the key techniques of the system, made the mathematical analysis to the system, and established the simulation model through MATLAB/SIMULINK. The simulation results proved that the system was feasible