Title :
Precision micromotor for surgery
Author :
Polla, D. ; Erdman, A. ; Peichel, D. ; Rizq, R. ; Gao, Y. ; Markus, D.
Author_Institution :
Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA
fDate :
6/22/1905 12:00:00 AM
Abstract :
A silicon-based piezoelectric linear stepper motor has been designed and fabricated. The motor is based on an inertial drive concept derived from sequential electrostatic clamping and unclamping of a piezoelectric bar measuring 38.1×6.36×0.787 mm. The piezoelectric micromotor has been constructed and tested for precision surgical applications. The measured performance is dependent on the operating conditions selected. Representative performance is a speed of 1.2 mm/s against a 3.0 N load. The motor is limited in its travel by approximately the diameter of the silicon wafer used to fabricated it. The resolution of the motor is less than 100 nm in its most precise actuation mode
Keywords :
biomedical equipment; electrostatic motors; piezoelectric motors; stepping motors; surgery; 100 nm; Si; inertial drive concept; medical instrumentation; most precise actuation mode; piezoelectric bar unclamping; precision micromotor; sequential electrostatic clamping; silicon wafer diameter; silicon-based piezoelectric linear stepper motor; Biomedical engineering; Biomedical measurements; Clamps; Dielectrics; Electrostatic measurements; Mechanical engineering; Micromotors; Minimally invasive surgery; Piezoelectric materials; Silicon;
Conference_Titel :
Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000
Print_ISBN :
0-7803-6603-4
DOI :
10.1109/MMB.2000.893766
