Title :
A touch probe sensor using longitudinal vibration of PZT thin film transducer
Author :
Kanda, Takefumi ; Morita, Takeshi ; Kurosawa, Minoru K. ; Higuchi, Toshiro
Author_Institution :
Dept. of Precision Machinery Eng., Tokyo Univ., Japan
fDate :
6/20/1905 12:00:00 AM
Abstract :
Touch probe sensors, rod-shaped and flat-type, have been fabricated. These sensors use the longitudinal vibration of PZT thin film transducer. The latter has been improved by miniaturization and using a flat configuration. The characteristics were evaluated by experiments
Keywords :
Q-factor; lead compounds; microsensors; piezoelectric thin films; piezoelectric transducers; scanning probe microscopy; surface topography measurement; PZT; PbZrO3TiO3; SPM; exponential horn; flat-type sensor; high precision CMM; longitudinal vibration; mechanical Q factor; miniaturization; resonance frequency; rod-shaped sensor; surface roughness measurement; thin film transducer; touch probe sensor; Probes; Resonance; Resonant frequency; Sensor phenomena and characterization; Tactile sensors; Thin film sensors; Transducers; Transistors; Vibrations; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762193
