Title :
A Scanning Micro-Mirror with an Adjustable Focal Length for Endoscope Applications
Author :
Lin, Lih Y. ; Strathman, Matthew ; Yunbo Liu ; Keeler, Ethan
Author_Institution :
Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA
Abstract :
In this work, we report design, fabrication and characterization of a 3-D scanning micro-mirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. The micro-mirror consists of a biaxial gimbal structure for 2-D beam scanning, and a deformable mirror membrane surface to achieve focus control. The micro-mirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <;40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <;100 V applied bias. We have also obtained imaging results using a micro-mirror with beam scanning-only function in both time-domain and spectral-domain optical coherence tomography systems.
Keywords :
bioMEMS; biomedical optical imaging; endoscopes; membranes; micromirrors; optical tomography; spectral-domain analysis; time-domain analysis; 2D beam scanning; 3D scanning micromirror device; actuation voltage; adjustable focal length; applied bias; biaxial gimbal structure; deformable mirror membrane surface; endoscope applications; endoscopic imaging probe; focus-tracking MEMS scanning mirror; microelectromechanical systems; optical scanning range; resonance; spectral-domain optical coherence tomography systems; time-domain optical coherence tomography systems; Cancer; Gastrointestinal tract; Micromechanical devices; Microscopy; MEMS; OCT imaging; focus-tracking; micro-mirror; scanning;
Conference_Titel :
Optomechatronic Technologies (ISOT), 2014 International Symposium on
DOI :
10.1109/ISOT.2014.41
