Title :
Design of a PZT Actuated Cantilever Waveguide Scanner Using an Aerosol Deposition Process
Author :
Schipf, David R. ; Chi-Leung Tsui ; Chun-Liang Kuo ; Yin-Jie Wang ; Wen-Jong Wu ; Wei-Chih Wang
Author_Institution :
Dept. of Mech. Eng., Univ. of Washington, Seattle, WA, USA
Abstract :
A new lead-zirconium-titanate (PZT) actuated scanning light source design is proposed. An Aerosol deposition process will be used to construct a high quality 5 μm thick film of PZT. The PZT actuator will induce non-linear vibrations to scan an area with a cantilever waveguide. The fabrication procedure for the design is presented. Fabrication results are discussed. A finite element analysis of the actuator pad is also presented. Fabrication steps needed for a comparison of the amplitude of actuation, resolution, and frequency of scan with previously developed Si based devices are also discussed.
Keywords :
aerosols; cantilevers; elemental semiconductors; finite element analysis; lead compounds; light sources; microactuators; optical scanners; optical waveguides; silicon; vibrations; PZT; PZT actuated cantilever waveguide scanner; PZT film; Si; Si based devices; actuated scanning light source; actuator pad; aerosol deposition process; finite element analysis; lead-zirconium-titanate; nonlinear vibrations; size 5 mum; Actuators; Aerosols; Endoscopes; Fabrication; Micromechanical devices; Optical waveguides; Steel; Aerosol Deposition; MEMS; PZT Actuator; Scanning Endoscope;
Conference_Titel :
Optomechatronic Technologies (ISOT), 2014 International Symposium on
DOI :
10.1109/ISOT.2014.42
