Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.