• DocumentCode
    3592498
  • Title

    32×32 strictly non-blocking Si-wire optical switch on ultra-small die of 11×25 mm2

  • Author

    Tanizawa, Ken ; Suzuki, Keijiro ; Toyama, Munehiro ; Ohtsuka, Minoru ; Yokoyama, Nobuyuki ; Matsumaro, Kazuyuki ; Seki, Miyoshi ; Koshino, Keiji ; Sugaya, Toshio ; Suda, Satoshi ; Cong, Guangwei ; Kimura, Toshio ; Ikeda, Kazuhiro ; Namiki, Shu ; Kawashima

  • Author_Institution
    Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We demonstrate an ultra-compact 32 × 32 path-independent-insertion-loss optical switch that integrates 1024 thermooptic MZ switches on SOI platform using ArF immersion lithography. On-chip loss of 19.7 dB and estimated crosstalk of -20 dB are achieved.
  • Keywords
    elemental semiconductors; integrated optics; integrated optoelectronics; lithography; optical communication equipment; optical crosstalk; optical losses; optical switches; silicon; silicon-on-insulator; thermo-optical devices; ArF immersion lithography; Mach-Zehnder switch; SOI platform; crosstalk; loss 19.7 dB; on-chip loss; silicon-on-insulator; strictly nonblocking Si-wire optical switch; thermooptic MZ switches; ultracompact path-independent insertion-loss optical switch; ultrasmall die; Crosstalk; Flip-chip devices; Optical crosstalk; Optical device fabrication; Optical switches; Optical waveguides; System-on-chip;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference and Exhibition (OFC), 2015
  • Type

    conf

  • Filename
    7121464
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3592498