Characterization of electronic materials using fundamental parameter micro X-ray fluorescence

Increasingly complex coating structure on electronic samples for functional purposes include multiple layers, ultra-thin coating and alloy coating. Such combinations have prohibited straightforward characterization by most techniques today. With the robust quantifying method offered by fundamental parameter approach and technologies available from energy-dispersive X-ray fluorescence (XRF), both thickness and chemical composition of the layers can be measured fast and non-destructively. Furthermore, the combination of micro-spot XRF also allows such analysis to be carried out on small parts, typically down to tens of micrometres. In this paper, application examples are presented with the advantages and challenges of this approach addressed.