Title :
Novel technique for UV-writing of low-loss and high-temperature stable channel waveguides
Author :
Bazylenko, M. ; Aslund, M. ; Vandenberg, B.
Author_Institution :
Opt. Fibre Technol. Centre, Sydney Univ., NSW, Australia
Abstract :
Low-loss channel waveguides, stable at over 500/spl deg/C, have been UV written by masking the channel area and exploiting the large negative refractive index changes in germanosilica layers deposited by hollow cathode PECVD.
Keywords :
optical fabrication; optical losses; optical planar waveguides; plasma CVD; refractive index; thermal stability; 500 C; UV written; UV-writing; channel area; germanosilica layers; hollow cathode PECVD deposition; large negative refractive index; low-loss channel waveguides; low-loss high-temperature stable channel waveguides; stable; Annealing; Australia; Circuits; Glass; Planar waveguides; Plasma temperature; Refractive index; Silicon compounds; Waveguide transitions; Writing;
Conference_Titel :
Optical Fiber Communication Conference, 1999, and the International Conference on Integrated Optics and Optical Fiber Communication. OFC/IOOC '99. Technical Digest
Print_ISBN :
1-55752-582-X
DOI :
10.1109/OFC.1999.766005
