Title :
The applications of Ga-doped ZnO films on LED chips
Author :
Yin, L.F. ; Han, T. ; Wang, J.B.
Author_Institution :
HC SemiTek Corp., Wuhan, China
Abstract :
Indium Tin Oxide (ITO) films are widely used on LED chips nowadays for the applications on ohmic contacts and current diffusion layer of p-GaN. However, ITO film is limited by the high cost and poison, it´s necessary to be instead. The transparent conductive oxide basic on Zinc oxide is one of the best choices. In this paper, a muti-structure, ITO/GZO films were carried out for an instead of ITO films. It was found ITO (5nm)/GZO films could improve the luminous intensity of LED chips with an ideal turn-on voltage. Compared to the LED chips with ITO films, the luminosity of LED chips with ITO (5nm)/GZO were improved by 5%.
Keywords :
indium compounds; light emitting diodes; thin films; tin compounds; zinc compounds; GZO films; ITO films; LED chips; ZnO:Ga; indium tin oxide films; luminous intensity; ohmic contacts; transparent conductive oxide; turn-on voltage; Annealing; Films; II-VI semiconductor materials; Indium tin oxide; Light emitting diodes; Ohmic contacts; Zinc oxide;
Conference_Titel :
Solid State Lighting (SSLCHINA), 2014 11th China International Forum on
Print_ISBN :
978-1-4799-6696-7
DOI :
10.1109/SSLCHINA.2014.7127217
