Title :
Adaptive optics for direct writing in three-dimensional nano-fabrication
Author :
Jesacher, Alexander ; Simmonds, Richard ; Wilson, Tony ; Booth, Martin J.
Author_Institution :
Dept. of Eng. Sci., Univ. of Oxford, Oxford, UK
Abstract :
Aberrations affect the focal spot quality in direct laser write applications when focusing through a refractive index mismatch. We develop adaptive optics to correct aberrations and demonstrate improved fabrication depth in several substrates.
Keywords :
Adaptive optics; Optical device fabrication; Optical distortion; Optical pulses; Optical refraction; Optical sensors; Optical variables control; Plasma measurements; Waveguide lasers; Writing;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
