Title :
Fabrication and release of SU-8 structures on soft substrate
Author :
Mishra, Richa ; Bhattacharyya, Tarun Kanti ; Maiti, Tapas Kumar
Author_Institution :
Adv. Technol. Dev. Center, Indian Inst. of Technol. (IIT) Kharagpur, Kharagpur, India
Abstract :
A recent trend in biosensors and biomedical devices is the fabrication of compact, high aspect ratio and free-standing biocompatible structures with application as force sensors, micro-needle-based drug delivery systems, array of chemical sensors, etc. SU-8 photoresist is a promising candidate to fulfill such structure. Poly(Dimethylsiloxane) has been used as the sacrificial layer to successfully release the SU-8 structures without the use of any specialized equipment, like a dicing saw.
Keywords :
biomedical electronics; biosensors; photoresists; SU-8 photoresist structure; biomedical device; biosensor; chemical sensor array; dicing saw; force sensor; free-standing biocompatible structure; microneedle-based drug delivery system; polydimethylsiloxane; soft substrate; Fabrication; Glass; Partial discharges; Plasmas; Substrates; Surface discharges; Surface treatment; PDMS; SU-8; biosensors; sacrificial layer; surface modification;
Conference_Titel :
Emerging Electronics (ICEE), 2014 IEEE 2nd International Conference on
Print_ISBN :
978-1-4673-6527-7
DOI :
10.1109/ICEmElec.2014.7151147
